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[Case Study] RTP (Rapid Thermal Process)

[Case Study] RTP (Rapid Thermal Process)

This is a case study of RTP using light sources for light heating from Ushio, a company with tradition and a wealth of achievements. In the past, semiconductor thermal processing commonly used furnaces (insulated), but for nano-order devices, thin film formation and shallow junctions are required, making RTP, which is synonymous with isothermal processes, a key technology. Additionally, in next-generation semiconductors, flash lamp annealing has become the mainstream technology as a thermal flux technique. ● For other functions and details, please contact us.

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[Case Study] Insulation and Heating of Liquids

[Case Study] Insulation and Heating of Liquids

This is an introduction to examples of liquid temperature maintenance and overheating using Ushio's light source for thermal heating, which has a tradition and a wealth of achievements. 【Features】 ○ Capable of maintaining temperature and humidifying pure water and chemical solutions used for cleaning silicon wafers in semiconductor manufacturing lines and glass substrates in LCD manufacturing lines. ○ Composed of halogen lamps covered with high-quality quartz glass, resulting in minimal impurity contamination and the ability to heat efficiently with an efficiency of over 95%. ● For other functions and details, please contact us.

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What can be done with Ushio's light: "Heating light source for solar cell manufacturing"

What can be done with Ushio's light: "Heating light source for solar cell manufacturing"

Ushio's new energy technology development light source Introduction of practical examples of heating light sources for solar cell manufacturing 【Features】 ○ "Non-contact high-speed temperature rise and fall" using halogen lamp heaters is adopted as a standard heat source in equipment such as firing furnaces, CVD, and sputtering. ○ The long heaters, which have accumulated years of experience in the FPD market and high-precision thermal processing capabilities cultivated in the semiconductor market, are immediately applicable in various solar cell manufacturing processes. ● For other functions and details, please contact us.

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